Semiconductor structures (52-9, 52-11, 52-12) and methods (100-300) are
provided for a semiconductor devices employing strained (70) and relaxed
(66) semiconductors, The method comprises, forming (106, 208, 308) on a
substrate (54, 56, 58) first (66-1) and second (66-2) regions of a first
semiconductor material (66) of a first conductivity type and a first
lattice constant spaced apart by a gap or trench (69), filling (108, 210,
308) the trench or gap (69) with a second semiconductor material (70) of
a second, conductivity type and a second different lattice constant so
that the second semiconductor material (70) is strained with respect to
the first semiconductor material (66) and forming (110, 212, 312) device
regions (80, 88, S, G, D) communicating with the first (66) and second
(70) semiconductor materials and adapted to provide device current (87,
87') through at least part of the strained second semiconductor material
(70) in the trench (69). In a preferred embodiment, the relaxed
semiconductor material is 80:20 Si:Ge and the strained semiconductor
material is substantially Si.