In methods of manufacturing a variable resistance structure and a
phase-change memory device, after forming a first insulation layer on a
substrate having a contact region, a contact hole exposing the contact
region is formed through the first insulation layer. After forming a
first conductive layer on the first insulation layer to fill up the
contact hole, a first protection layer pattern is formed on the first
conductive layer. The first conductive layer is partially etched to form
a contact and to form a pad on the contact. A second protection layer is
formed on the first protection layer pattern, and then an opening
exposing the pad is formed through the second protection layer and the
first protection layer pattern. After formation of a first electrode, a
phase-change material layer pattern and a second electrode are formed on
the first electrode and the second protection layer.