An original master manufacturing method of rotating an original master at
a constant linear velocity, moving in a plane the original master in a
predetermined radial direction at a constant velocity which is provided
with a predetermined amount of movement per round of the original master,
deflecting the electron beam in the planar movement direction of the
original master by a first deflection amount equal to the predetermined
movement amount per round of the original master on the surface of the
original master during exposure of the concentric circular data patterns
corresponding to first through (n-1)-th rounds of each of the plurality
of tracks, upon completion of the exposure of the concentric circular
data patterns corresponding to the first through (n-1)-th rounds,
deflecting the electron beam in a direction opposite to the planar
movement direction of the original master by a second deflection amount
equal to the predetermined distance on the surface of the original
master, and upon completion of exposure of the concentric circular data
pattern corresponding to an n-th round of each of the plurality of
tracks, deflecting the electron beam in the direction opposite to the
planar movement direction of the original master by a third deflection
amount on the surface of the original master such that an irradiation
position of the electron beam is located at an exposure start position on
the concentric circle of a first round of an adjacent track.