A method for growing high quality, nonpolar Group III nitrides using
lateral growth from Group III nitride nanowires. The method of
nanowire-templated lateral epitaxial growth (NTLEG) employs
crystallographically aligned, substantially vertical Group III nitride
nanowire arrays grown by metal-catalyzed metal-organic chemical vapor
deposition (MOCVD) as templates for the lateral growth and coalescence of
virtually crack-free Group III nitride films. This method requires no
patterning or separate nitride growth step.