This invention relates to a system for exciting oscillations of
micromechanical cantilever sensors and for measuring and evaluating the
corresponding oscillations. Such sensors can e.g. be used to detect
chemical substances, biomolecules, microorganisms or viruses, or to
analyze surface-related phenomena and processes such as conformational
changes or phase transitions in thin layers, or to measure physical
properties of their surrounding, such as viscoelastic properties of
liquids. In the so-called dynamic operation mode, cantilever oscillations
are excited and the frequency shift of the ground frequency and/or of one
or some higher harmonics, occurring because of a process taking place at
the cantilever surface, are measured. In the so-called static mode, the
deflection of the cantilever is determined. The setup described in this
invention allows measurements in gases as well as liquids. It is
characterized by an efficient transfer of the oscillation from a
piezoelectric driver element to the cantilever over a wide frequency
range. This is achieved through a sophisticated combination of a solid
support structure, oscillation driver and insulators.