An exposure method includes the steps of (a) calculating a pupil
transmittance distribution in a projection optical system based on a
first effective light source distribution of the projection optical
system acquired by a measuring apparatus of an exposure apparatus, and a
second effective light source distribution derived from a pupil plane
light intensity distribution measured on a plate plane using light that
has passed the projection optical system without a reticle, (b)
calculating an imaging performance by using a result of the pupil
transmittance distribution calculating step and the first or second
effective light source distributions, (c) adjusting at least one of the
effective light source distribution or the projection optical system by
using the imaging performance, and (d) exposing the plate based on at
least one of the effective light source distribution and the projection
optical system that have been adjusted.