A method of manufacturing a semiconductor device, the semiconductor device
comprising: a semiconductor substrate; a pixel portion including an
in-layer lens; and a peripheral circuit portion including a metal wiring
portion, the pixel portion and the peripheral circuit portion being on
the semiconductor substrate, the method comprising: forming an insulating
film in the pixel portion and the peripheral circuit portion, so as to
cover the metal wiring portion; providing, on the insulating film, a lens
material layer for forming the in-layer lens; forming a resist layer for
etching the lens material layer; curing the resist layer; and forming a
first region and a second region in the resist layer, wherein a portion
of the resist layer in the first region is thicker than that of the
resist layer in the second region, the first region being in the
peripheral circuit portion and the second region being in the pixel
portion.