A catadioptric projection objective for imaging a pattern provided in an
object plane of the projection objective onto an image plane of the
projection objective comprises: a first objective part for imaging the
pattern provided in the object plane into a first intermediate image; a
second objective part for imaging the first intermediate imaging into a
second intermediate image; a third objective part for imaging the second
intermediate imaging directly onto the image plane;wherein a first
concave mirror having a first continuous mirror surface and at least one
second concave mirror having a second continuous mirror surface are
arranged upstream of the second intermediate image;pupil surfaces are
formed between the object plane and the first intermediate image, between
the first and the second intermediate image and between the second
intermediate image and the image plane; andall concave mirrors are
arranged optically remote from a pupil surface. The system has potential
for very high numerical apertures at moderate lens material mass
consumption.