The invention relates to an imprint apparatus for carrying out a two-step process for transferring a pattern from a template to a target surface of a substrate. The apparatus works by creating an intermediate disc, e.g. from a flexible polymer stamp, by imprint from the template in a first imprint unit. A feeder device is then operated to feed the intermediate stamp to a second imprint unit, where it is used to make an imprint in a target surface of a substrate.