An inductively coupled plasma mass spectrometer comprises a control device 70 for collectively controlling each of the following factors: the amount of liquid drops in the aerosol that is to be supplied to a plasma torch 20, the flow rate of carrier gases 76A and 76B in this aerosol, the RF output of a high-frequency power source 80, and the distance Z between plasma torch 20 and sampling interface 15 and 16.