An electrical fuse and a first dielectric layer thereupon are formed on a
semiconductor substrate. Self-assembling block copolymers containing two
or more different polymeric block components are applied into a recessed
region surrounded by a dielectric template layer. The self-assembling
block copolymers are then annealed to form a pattern of multiple circles
having a sublithographic diameter. The pattern of multiple circles is
transferred into the first dielectric layer by a reactive ion etch,
wherein the portion of the first dielectric layer above the fuselink has
a honeycomb pattern comprising multiple circular cylindrical holes. A
second dielectric layer is formed over the circular cylindrical holes by
a non-conformal chemical vapor deposition and sublithographic cavities
are formed on the fuselink. The sublithographic cavities provide enhanced
thermal insulation relative to dielectric materials to the fuselink so
that the electrical fuse may be programmed with less programming current.