A semiconductor structure including an nFET having a fully silicided gate
electrode wherein a new dual stress liner configuration is used to
enhance the stress in the channel region that lies beneath the gate
electrode is provided. The new dual stress liner configuration includes a
first stress liner that has an upper surface that is substantially planar
with an upper surface of a fully silicided gate electrode of the nFET. In
accordance with the present invention, the first stress liner is not
present atop the nFET including the fully silicided gate electrode.
Instead, the first stress liner of the present invention partially wraps
around, i.e., surrounds the sides of, the nFET with the fully silicided
gate electrode. A second stress liner having an opposite polarity as that
of the first stress liner (i.e., of an opposite stress type) is located
on the upper surface of the first stress liner as well as atop the nFET
that contains the fully silicided FET. In accordance with the present
invention, the first stress liner is a tensile stress liner and the
second stress liner is a compressive stress liner.