A formulation for removing photoresist, ion implanted photoresist, etch
residue or BARC comprises: an ammonium hydroxide and a
2-aminobenzothiazole, remainder water. Preferably the formulation
comprises: tetramethyl ammonium hydroxide, tolyltriazole, propylene
glycol, 2-aminobenzothiazole, dipropylene glycol monomethyl ether,
remainder water; more preferably: tetramethyl ammonium hydroxide 1-15 wt
%, tolyltriazole 1-5 wt %, propylene glycol 5-15 wt %,
2-aminobenzothiazole 1-10 wt %; dipropylene glycol monomethyl ether 20-45
wt %, remainder water. The invention is also a method of removing
materials selected from the group consisting of photoresist, etch
residue, BARC and combinations thereof, from a substrate comprising:
applying a formulation, described above, to the substrate to remove the
material from the substrate.