Methods and devices for the interfacing of microchips to various types of modules are disclosed. The technology disclosed can be used as sample preparation and analysis systems for various applications, such asDNA sequencing and genotyping, proteomics, pathogen detection, diagnostics and biodefense.

 
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< POSITION MEASURING MODULE, POSITION MEASURING APPARATUS, STAGE APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

> SENSING METHOD, SENSING DEVICE, INSPECTION CHIP, AND INSPECTION KIT

> MARKER STRUCTURE AND METHOD FOR CONTROLLING ALIGNMENT OF LAYERS OF A MULTI-LAYERED SUBSTRATE

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