A topcoat material for immersion lithography and a method of performing
immersion lithography using the topcoat material. The topcoat material
includes a mixture of a first polymer and a second polymer. The first and
second polymers of the topcoat material, when the topcoat material is
formed into a topcoat layer between an immersion fluid and a photoresist
layer, disperse non-homogenously throughout the topcoat layer.