A driver laser for EUV light source apparatus which driver laser
simultaneously achieves short-pulsing and multi-line oscillation. The
driver laser includes: a short-pulse multi-line oscillated CO.sub.2 laser
oscillator having a device that shortens width of pulses included in a
laser beam to be output and a device that suppresses amplitude of an
oscillation spectrum exhibiting an energy peak value; and at least one
amplifier that inputs the laser beam output from the short-pulse
multi-line oscillated CO.sub.2 laser oscillator and amplifies the input
laser beam to output the amplified laser beam.