Systems and methods for producing and delivering vapor are disclosed. A
vaporizer tank containing a liquid may be heated such that liquid within
the tank is heated and vapor generated. The flow of this vapor to a
destination may then be regulated. Embodiments of the present invention
may control the temperature of this liquid such that a saturated vapor
condition is substantially maintained in the vaporizer tank. The
vaporizer tank is coupled to a mass flow controller which regulates the
delivery of the vapor to downstream components. By substantially
maintaining the saturated vapor condition within the vaporizer tank the
pressure of vapor at the mass flow controller can be substantially
maintained and a stable and consistent flow rate of vapor achieved.