A composition and associated method for chemical mechanical planarization
(or other polishing) are described. The composition contains a boron
surface-modified abrasive, a nitro-substituted sulfonic acid compound, a
per-compound oxidizing agent, and water. The composition affords high
removal rates for barrier layer materials in metal CMP processes. The
composition is particularly useful in conjunction with the associated
method for metal CMP applications (e.g., step 2 copper CMP processes).