A piezoelectric micro electro-mechanical system switch (MEMS), an array of
piezoelectric MEMS switches, and a method of fabricating the switch,
which are capable of improving low voltage and switching characteristics
while securing high signal isolation, are provided. The piezoelectric
MEMS switch includes a semiconductor substrate including a groove, a
support formed over the semiconductor substrate and the groove. An
actuator including a piezoelectric layer is formed on the support. A
switching member is formed on the support on one side of the actuator,
wherein upward movement of the switching member changes by a deformation
of the piezoelectric layer of the actuator. Radio frequency (RF) transfer
lines are arranged at a predetermined distance on the switching member
and are separated by a predetermined interval from each other. The
actuator is formed to have at least two cantilevers each having one end
such that the ends are connected to each other.