An arc chamber for an ion implantation system includes an exit aperture
positioned at a wall of the arc chamber, filaments respectively
positioned at two opposing sides within the arc chamber, and repeller
structures respectively positioned at two opposing walls within the arc
chamber between the filaments and the arc chamber. The repeller structure
includes a repeller substrate with a screw axis for fitting the repeller
structure to the arc chamber, an insulator positioned underneath the
repeller substrate providing an electrical isolation between the repeller
substrate and the arc chamber, and a conductive spacer covering a portion
of the insulator positioned in between the insulator and the arc chamber.