A substrate processing system includes a first, movable surface tension
gradient device, a dicing device and a system controller. The first,
movable surface tension gradient device is capable of supporting a first
process within a first meniscus. The first meniscus being supported
between the first surface tension gradient device and a first surface of
the substrate. The first movable surface tension gradient device capable
of being moved relative to the first surface of the substrate. The dicing
device is oriented to a desired dicing location. The desired dicing
location being encompassed by the meniscus. The system controller is
coupled to the dicing device and the surface tension gradient device. The
system controller includes a process recipe. A method for dicing a
substrate is also described.