A thin film photoelectric converter, especially an integrated thin film
photoelectric converter having improved photoelectric conversion
efficiency is provided by controlling an open-circuit voltage and a fill
factor so as not be small in a thin film photoelectric converter
including a crystalline silicon photoelectric conversion unit. The thin
film photoelectric converter by the present invention has at least a
transparent electrode film, a crystalline silicon photoelectric
conversion unit, and a back electrode film formed sequentially on one
principal surface of a transparent substrate, and the converter has a
whitish discoloring area on a part of a surface of the converter after
formation of the crystalline silicon photoelectric conversion unit. A
percentage of dimensions of the whitish discoloring area preferably is
not more than 5% of a dimension of the photoelectric conversion area. A
thin film photoelectric converter of the present invention is preferably
an integrated thin film photoelectric converter.