Reticle management systems and methods. The system comprises at least one
reticle and at least one cabinet with an inert gas environment. The
cabinet comprises a plurality of storage spaces. When the reticle is put
in a storage space, the cabinet identifies the reticle and the storage
space occupied thereby. The cabinet provides inert gas to the reticle.
The storage information of the reticle in the cabinet and/or an inert gas
status of the reticle are provided to a query system and a dispatch
system for reticle location query and lot dispatching.