In a first aspect, a wafer loading station adapted to exchange wafer
carriers with a wafer carrier transport system comprises a biasing
element adapted to urge the end effector of the wafer loading station
away from a moveable conveyor of the wafer carrier transport system upon
the occurrence of a unscheduled event such as a power failure or an
emergency shutdown. In a second aspect, an uninterruptible power supply
commands a controller to cause the wafer carrier handler to retract the
end effector from the wafer carrier transport system upon the occurrence
of the unscheduled event, and provides the power necessary for the same.
Numerous other aspects are provided.