Nitrogen and aluminum and fluxing agents (Al.sub.2O.sub.3, SiO.sub.2, CaO and MgO) are added to molten silicon to create an oxy-nitride slag that acts as a sink for dissolved boron and phosphorus. The nitrogen can be added by bubbling nitrogen gas through the molten silicon; the aluminum can be added as aluminum metal or as Al.sub.2O.sub.3. Normally, the silicon must initially be deoxidized to allow the boron and phosphorus refining reactions to occur. The process may be followed by oxidative refining, SiC settling, the Silgrain process and directional solidification to remove other impurities and produce silicon suitable for use in solar cells. In an alternative version of the process, the molten silicon is passed through a particulate bed formed of a nitrogen-containing compound and an aluminum-containing compound.

 
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