An improved relative humidity sensor apparatus that provides a more
accurate measurement of humidity in the presence of water condensation. A
series capacitive sensor includes a thin porous platinum top plate, a
humidity sensitive polyimide dielectric, and two metal bottom plates on a
semiconductor substrate. The two capacitors can be wired in series such
that the metal bottom plates form independent, electrically driven
connections. The thin top layer can form a top plate. Changes in humidity
affect the humidity sensitive dielectric thereby causing changes in the
capacitive value. A P-well layer and a P-plus layer can be added at the
perimeter of the substrate to create a path for a parasitic capacitance
caused by water condensation to connect to one or more connection nodes,
thereby preventing erroneous measurements of humidity in the presence of
water condensation.