The inventive method includes a preparation step during which the
substrate is covered with a layer, a pressing step in which a mould
including a pattern of recesses and protrusions is pressed into part of
the thickness of the aforementioned layer, at least one etching step in
which the layer is etched until parts of the surface of the substrate
have been stripped, and a substrate etching step whereby the substrate is
etched using an etching pattern which is defined from the mould pattern.
The preparation step includes a sub-step consisting of the formation of a
lower sub-layer of curable material, a step involving the curing of said
layer and a sub-step including the formation of an outer sub-layer which
is adjacent to the cured sub-layer. Moreover, during the pressing step,
the above-mentioned protrusions in the mould penetrate the outer
sub-layer until contact is reached with the cured sub-layer.