A scanning probe apparatus for obtaining information of a sample,
recording information in the sample, or processing the sample with
relative movement between the sample and the apparatus, the apparatus is
constituted by a probe; and a scanning stage including a drive element
for moving a sample holding table for holding the sample and a movable
portion movable in a direction in which an inertial force generated
during movement of the sample holding table is cancelled. The scanning
stage further includes a drive circuit for driving the scanning stage and
is detachably or replaceably mountable to a main assembly of the
apparatus.