Various computer-implemented methods are provided. One method for
evaluating reticle layout data includes generating a simulated image
using the reticle layout data as input to a model of a reticle
manufacturing process. The simulated image illustrates how features of
the reticle layout data will be formed on a reticle by the reticle
manufacturing process. The method also includes determining
manufacturability of the reticle layout data using the simulated image.
The manufacturability is a measure of how accurately the features will be
formed on the reticle. Also provided are various carrier media that
include program instructions executable on a computer system for
performing a method for evaluating reticle layout data as described
herein. In addition, systems configured to evaluate reticle layout data
are provided. The systems include a computer system and a carrier medium
that includes program instructions executable on the computer system for
performing method(s) described herein.