A method for a piezoelectric actuator and an ink-jet head uses, for
forming a lower electrode on a vibration plate, metal-nano particles
which can start to sinter with a low temperature as a conductive
material; and uses, for forming a piezoelectric layer, an aerosol
deposition method requiring no calcination step. Accordingly, upon
forming the lower electrode and piezoelectric layer, any calcination
under severe condition is not needed. In addition, the calcination of the
lower electrode can be advanced simultaneously with an annealing step
required after forming the piezoelectric layer. Accordingly, the thermal
cycle during producing process can be minimized, thereby suppressing the
exfoliation of layers and diffusion of material forming vibration plate
into the piezoelectric layer due to thermal history, and consequently
lower the degradation of piezoelectric characteristics.