The invention provides a miniature robust fiber optic pressure sensor. The
miniature fiber optic sensor comprises a Fabry-Perot chip bonded to an
optical fiber. The invention provides a new sensor design that reduces
the amount of adhesive required to bond the optical fiber to the
Fabry-Perot sensor such that the sensor is less sensitive to moisture.
The invention also provides manufacturing methods of the sensor
comprising a method based on etching and a method based on using an
excimer laser. The invention also provides a chip design that renders the
chip less sensitive to thermal changes. The invention also provides a
chip design in which a sensor diaphragm has a well-defined thickness. The
invention also provides a chip design that protects the chip from
etching.