A liquid chemical supply system that performs accurate pressure feedback
control and controls the discharge flow rate of liquid chemical with high
precision, even when the pressure setting value of the operation pressure
differs due to changes in the type of liquid chemical, includes a pump
having a pump chamber and an operation chamber separated by a diaphragm
comprised of a flexible membrane. The intake and discharge of liquid
chemical is performed in accordance with the change in pressure inside
the operation chamber. An electro-pneumatic regulator supplies operation
gas pressure to the operation chamber. A plurality of pressure sensors
having different pressure detection ranges is provided for detecting the
operation gas pressure. A controller selectively employs any of the
detection results of the plurality of sensors in accordance with the
pressure setting value of the operation air that is set for each use, and
performs pressure feedback control.