Vertical device structures incorporating at least one nanotube and methods
for fabricating such device structures by chemical vapor deposition. Each
nanotube is grown by chemical vapor deposition catalyzed by a catalyst
pad and encased in a coating of a dielectric material. Vertical field
effect transistors may be fashioned by forming a gate electrode about the
encased nanotubes such that the encased nanotubes extend vertically
through the thickness of the gate electrode. Capacitors may be fashioned
in which the encased nanotubes and the corresponding catalyst pad bearing
the encased nanotubes forms one capacitor plate.