A noise-component removing method for removing a noise component from
multipoint spectral data that has been generated through measurements
performed at measurement points of a sample surface, the method
comprising: a PLS analysis step of determining components of the
multipoint spectral data for each measurement point in a descending order
of eigenvalues of the components by subjecting the multipoint spectral
data to multivariate analysis based on the partial least squares
regression using a value obtained by quantifying characteristic
information about a characteristic of each measurement point, other than
spectral information of the measurement point and using the spectral
information as an independent variable in the partial least squares
regression; and a spectrum reconstruction step of reconstructing the
multipoint spectral data for each measurement point to eliminate a
component having an eigenvalue lower than a predetermined value, from the
components determined in the PLS analysis step.