The invention is concerned with a material which shows low absorption for
UV radiation having a wavelength below 250 nm, low birefringence, high
chemical resistance and high radiation resistance and which is therefore
particularly usable for making optical components for microlithography.
According to the invention the material consists of synthetically
produced quartz crystallites which form a polycrystalline structure and
have a mean grain size in the range between 500 nm and 30 .mu.m. The
method according to the invention for making a blank from the material
comprises providing granules consisting of synthetically produced quartz
crystals having a mean grain size in the range between 500 nm and 30
.mu.m, and sintering the granules to obtain a blank of polycrystalline
quartz.