An auxiliary valve member, an auxiliary pilot pressure chamber for
applying a pilot fluid pressure to the auxiliary valve body, and a
transmitting rod for transmitting operating force of the auxiliary valve
body to a main diaphragm are provided other than the main diaphragm which
is in contact with or separating from a main valve seat by operating by
means of application of the pilot fluid pressure in a diaphragm valve
portion, as a mechanism for strengthening valve-closing force of the main
diaphragm, so as for the main diaphragm not to be separated from the
valve seat even when the fluid pressure from a load is applied to the
main diaphragm as adverse pressure.