A method of polishing a substrate with a polishing composition comprising
an oxidizing agent and abrasive particles having a surface, said surface
of the abrasive particles being at least partially modified with 1) at
least one stabilizer compound comprising aluminum, boron, tungsten, or
both, said stabilizer compound being bound via a covalent bond to said
abrasive particles, and 2) an organic chelating compound, said chelating
compound being bound via a covalent bond to said stabilizer compound. The
organic chelating compounds include one or more of 1) a
nitrogen-containing moiety and between one and five other polar groups;
2) a sulfur-containing moiety and between one and five other polar
groups; and 3) between two and five polar groups selected from carboxylic
acid groups or salts thereof and hydroxyl groups.