A memory device comprising a vertical transistor includes a digit line
that is directly coupled to the source regions of each memory cell.
Because an electrical plug is not used to form a contact between the
digit line and the source regions, a number of fabrication steps may be
reduced and the possibility for manufacturing defects may also be
reduced. In some embodiments, a memory device may include a vertical
transistor having gate regions that are recessed from an upper portion of
a silicon substrate. With the gate regions recessed from the silicon
substrate, the gate regions are spaced further from the source/drain
regions and, accordingly, cross capacitance between the gate regions and
the source/drain regions may be reduced.