A radiation system for generating a beam of radiation that defines an
optical axis is provided. The radiation system includes a plasma produced
discharge source for generating EUV radiation. The discharge source
includes a pair of electrodes constructed and arranged to be provided
with a voltage difference, and a system for producing a plasma between
the pair of electrodes so as to provide a discharge in the plasma between
the electrodes. The radiation system also includes a debris catching
shield for catching debris from the electrodes. The debris catching
shield is constructed and arranged to shield the electrodes from a line
of sight provided in a predetermined spherical angle relative the optical
axis, and to provide an aperture to a central area between the electrodes
in the line of sight.