Provided is a plasma diagnostic apparatus having a probe unit, which is
inserted into a plasma or disposed at boundary of a plasma, the apparatus
including: a signal supplying unit having a signal supplying source; a
current detecting/voltage converting unit for applying a periodic voltage
signal applied from the signal supplying unit to the probe unit,
detecting the magnitude of the current flowing through the probe unit,
and converting the detected current into a voltage; and a by-frequency
measurement unit for computing the magnitude and phase of individual
frequency components of the current flowing through the probe unit by
receiving the voltage output from the current detecting/voltage
converting unit as an input.