A system and method are provided for processing a semiconductor film using
a digital light valve. The method enables pixel elements from an array of
selectable pixel elements; gates a light in response to enabling the
pixel elements; exposes selected areas of a semiconductor film, such as
Si, to the gated light; and, creates light-related reactions in the
semiconductor film, in response to the light exposure. More specifically,
enabling pixel elements from an array of selectable pixel elements may
include: exposing a digital light valve array of selectable pixel
elements to the light; enabling a pattern of pixel elements; and,
transmitting light from the pattern of enabled pixel elements. Examples
of light-related reactions include changing the topology of a film
surface, creating a chemical reaction, diffusing a dopant, activating a
dopant, alloying the semiconductor film, and changing the semiconductor
crystalline structure.