In accordance with the invention, the structure (10A, 10B) of a patterned
nanoscale or near nanoscale device ("nanostructure") is repaired and/or
enhanced by liquifying the patterned device in the presence of
appropriate guiding conditions for a period of time and then permitting
the device to solidify. Advantageous guiding conditions include adjacent
spaced apart or contacting surfaces (12, 13A, 13B) to control surface
structure and preserve verticality and unconstrained boundaries to permit
smoothing of edge roughness. In an advantageous embodiment, a flat planar
surface (12) is disposed overlying a patterned nanostructure surface
(13A, 13B) and the surface (13A, 13B) is liquified by a high intensity
light source to repair or enhance the nanoscale features.