A memory is encoded with a data structure that represents a pattern having
a range for one or more dimensions and/or positions of line segments
therein. The data structure identifies two or more line segments that are
located at a boundary of the pattern. The data structure also includes at
least one set of values that identify a maximum limit and a minimum limit
(i.e. the range) between which relative location and/or dimension of an
additional line segment of the pattern in a portion of a layout of an
integrated circuit (IC) chip, represents a defect in the IC chip when
fabricated. In most embodiments, multiple ranges are specified in such a
range defining pattern for example a width range is specified for the
width of a trace of material in the layout and a spacing range is
specified for the separation distance between two adjacent traces in the
layout.