Heat treatment equipment and a method of driving the same are provided.
The heat treatment equipment includes: a process tube having an aperture
at one side thereof; a sealing unit for opening or closing the aperture;
and a pressure sensor for measuring sealing pressure between the sealing
unit and the one side of the process tube. In the heat treatment
equipment, the aperture of the process tube can be sealed according to
the sealing pressure of the sealing unit so that the process tube can be
precisely sealed.