A catadioptric projection objective for projecting a pattern arranged in
the object plane of the projection objective into the image plane of the
projection objective, having: a first objective part for projecting an
object field lying in the object plane into a first real intermediate
image; a second objective part for generating a second real intermediate
image with the radiation coming from the first objective part; a third
objective part for generating a third real intermediate image with the
radiation coming from the second objective part; and a fourth objective
part for projecting the third real intermediate image into the image
plane.