An object of the present invention is to provide a quartz glass body,
especially a quartz glass jig for plasma reaction in producing
semiconductors having excellent resistance against plasma corrosion,
particularly, excellent corrosion resistance against F-based gaseous
plasma; and a method for producing the same. A body made of quartz glass
containing a metallic element and having an improved resistance against
plasma corrosion is provided that contains bubbles and crystalline phase
at an amount expressed by projected area of less than 100 mm.sup.2 per
100 cm.sup.3.