A apparatus and method are disclosed which may comprise a fluorine gas
discharge laser system and electrode support system which may comprise a
first electrode electrically connected to a source of high voltage; a
first insulating mechanism insulating the first electrode from ground; a
second electrode electrically insulated from the source of high voltage
and together with the first electrode forming an elongated discharge
region between portions of the first and second electrodes respectively
extending along a longitudinal axis of each of the first and second
electrodes, defining electrode discharge receiving region end portions; a
plurality of current return tines electrically connected to the second
electrode and to ground, the tines distributed along the longitudinal
extent of the elongated discharge region; a second insulating mechanism
electrically isolating the second electrode from ground except through
the plurality of current return tines.