An object is to provide a laser light irradiation apparatus and a laser
light irradiation method which reduce errors of an irradiation position
of laser light to an irradiated object and allow irradiation with laser
light of any size when the irradiated object is irradiated with the laser
light through a beam expander optical system. One feature of a laser
light irradiation apparatus of the present invention is to include a
laser oscillator; a beam expander optical system having a zoom function;
and a correction lens disposed to conjugate the laser oscillator and the
beam expander optical system including at least a first lens, a second
lens, and a third lens in order in a traveling direction of the laser
light, wherein the second lens and the third lens are cooperated with
each other in accordance with the magnification of the laser light.