A positive resist composition comprises: (A) a compound that generates an
acid upon irradiation with an actinic ray or radiation; and (B) a resin
that has an acid-decomposable repeating unit represented by formula (I'),
has a dispersity of 1.5 or less and increases its solubility in an alkali
developer by action of an acid,
##STR00001## wherein Xa.sub.1 represents a hydrogen atom, an alkyl
group, a cyano group or a halogen atom; Ry.sub.1 to Ry.sub.3 each
independently represents an alkyl group or a cycloalkyl group, and at
least two members out of Ry.sub.1 to Ry.sub.3 may combine to form a ring
structure; and Z represents a divalent linking group.