According to one aspect of the invention, a method of constructing an
electronic assembly is provided. A layer of metal is formed on a backside
of a semiconductor wafer having integrated formed thereon. Then, a porous
layer is formed on the metal layer. A barrier layer of the porous layer
at the bottom of the pores is thinned down. Then, a catalyst is deposited
at the bottom of the pores. Carbon nanotubes are then grown in the pores.
Another layer of metal is then formed over the porous layer and the
carbon nanotubes. The semiconductor wafer is then separated into
microelectronic dies. The dies are bonded to a semiconductor substrate, a
heat spreader is placed on top of the die, and a semiconductor package
resulting from such assembly is sealed. A thermal interface is formed on
the top of the heat spreader. Then a heat sink is placed on top of the
thermal interface.